{"id":13427,"date":"2025-06-17T07:45:38","date_gmt":"2025-06-17T05:45:38","guid":{"rendered":"https:\/\/www.sensors-components.endress.com\/?p=13427"},"modified":"2025-06-18T08:44:54","modified_gmt":"2025-06-18T06:44:54","slug":"our-sensors-your-application-capacative-ceramic-pressure-sensors-for-vacuum-gauge","status":"publish","type":"post","link":"https:\/\/www.sensors-components.endress.com\/en\/2025\/06\/17\/our-sensors-your-application-capacative-ceramic-pressure-sensors-for-vacuum-gauge\/","title":{"rendered":"Our Sensors &#8211; Your Application: capacative ceramic pressure sensors for vacuum gauge"},"content":{"rendered":"<div id='full_slider_1'  class='avia-fullwidth-slider main_color avia-shadow   avia-builder-el-0  el_before_av_textblock  avia-builder-el-first   container_wrap fullsize'  ><div  class='avia-slideshow av-l7q6njly-bdf30f596308014a37edee5a718c5d66 avia-slideshow-featured av_slideshow_full avia-slide-slider av-slideshow-ui av-control-default av-slideshow-manual av-loop-once av-loop-manual-endless av-default-height-applied   avia-slideshow-1' data-slideshow-options=\"{&quot;animation&quot;:&quot;slide&quot;,&quot;autoplay&quot;:false,&quot;loop_autoplay&quot;:&quot;once&quot;,&quot;interval&quot;:5,&quot;loop_manual&quot;:&quot;manual-endless&quot;,&quot;autoplay_stopper&quot;:false,&quot;noNavigation&quot;:false,&quot;bg_slider&quot;:false,&quot;keep_padding&quot;:false,&quot;hoverpause&quot;:false,&quot;show_slide_delay&quot;:0}\"  itemprop=\"image\" itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/ImageObject\" ><ul class='avia-slideshow-inner ' style='padding-bottom: 27.2%;'><li  class='avia-slideshow-slide av-l7q6njly-bdf30f596308014a37edee5a718c5d66__0  av-single-slide slide-1 slide-odd'><div data-rel='slideshow-1' class='avia-slide-wrap '   ><img decoding=\"async\" fetchpriority=\"high\" class=\"wp-image-10765 avia-img-lazy-loading-not-10765\"  src=\"https:\/\/www.sensors-components.endress.com\/wp-content\/uploads\/2024\/09\/Abs_Gauge_Pressure_UxCx0_1920x400-1500x408.jpg\" width=\"1500\" height=\"408\" title='Abs_Gauge_Pressure_UxCx0_1920x400' alt=''  itemprop=\"thumbnailUrl\"   \/><\/div><\/li><\/ul><\/div><\/div><div id='after_full_slider_1'  class='main_color av_default_container_wrap container_wrap fullsize'  ><div class='container av-section-cont-open' ><div class='template-page content  av-content-full alpha units'><div class='post-entry post-entry-type-page post-entry-13427'><div class='entry-content-wrapper clearfix'>\n<section  class='av_textblock_section av-l7q6pzyl-709d05a1f6f49ac0e1d2a875291c95a6 '   itemscope=\"itemscope\" itemtype=\"https:\/\/schema.org\/BlogPosting\" itemprop=\"blogPost\" ><div class='avia_textblock'  itemprop=\"text\" ><h1><strong>Capacitive Ceramic Pressure Sensors for Vacuum Gauge in Semiconductor Industry<\/strong><\/h1>\n<p><strong>The application:<\/strong><\/p>\n<p>Vacuum gauges are essential instruments for measuring and monitoring vacuum level in various industries. In semiconductor manufacturing, vacuum gauges are widely used to monitor and control vacuum levels during processes, such as etching and deposition.<\/p>\n<p><strong>The challenge:<\/strong><\/p>\n<ul>\n<li><strong>Precision and accuracy requirements<\/strong><\/li>\n<\/ul>\n<p>Semiconductor manufacturing processes demand extremely high precision and accuracy in vacuum measurements. Even minor deviations in pressure can lead to defects in wafer processing, such as uneven etching or deposition. Vacuum gauges must operate with high sensitivity and stability to ensure consistent process control.<\/p>\n<ul>\n<li><strong>Chemical resistance<\/strong><\/li>\n<\/ul>\n<p>Semiconductor fabs utilize a wide range of process gases and chemicals, which can be corrosive or reactive. Vacuum gauges must be compatible with these substances to avoid contamination.<\/p>\n<p><strong>Our solution:<\/strong><\/p>\n<p>Compared to traditional technologies like Pirani gauges or piezoresistive pressure sensors, capacitive ceramic pressure sensors from the Ceracore family from Endress+Hauser offer following advantages:<\/p>\n<ul>\n<li><strong>Exceptional resistence to environmental influences<\/strong><\/li>\n<\/ul>\n<p>Ceramic capacitive pressure sensors from Endress+Hauser are produced using high-purity (99.9% Al<sub>2<\/sub>O<sub>3<\/sub>) ceramic materials, which exhibit excellent corrosion and abrasion resistance. This allows them to operate reliably in harsh conditions, such as high temperatures, low pressures, and corrosive atmospheres.<\/p>\n<ul>\n<li><strong>High sensitivity<\/strong><\/li>\n<\/ul>\n<p>The use of ceramic materials and capacitive sensing technology enables our sensors to detect extremely small changes and convert them into precise electrical signals. This high sensitivity allows for accurate measurement of vacuum levels. In vacuum gauge applications, where precise pressure measurements are crucial, the high sensitivity of capacitive ceramic pressure sensors ensures that even the slightest changes in vacuum can be detected and monitored.<\/p>\n<ul>\n<li><strong>Long-term stability<\/strong><\/li>\n<\/ul>\n<p>Ceracore capacitive pressure sensors exhibit high zero point stability, which means they can maintain high measurment accuracy and reliability over long periods of use. This long-term stability is essential for vacuum gauges, as it ensures consistent and accurate measurements throughout the operational life of the instrument. For example, in industrial processes that require continuous monitoring of vacuum levels, the long-term stability of ceramic capacitive pressure sensors helps to minimize measurement errors and improve process control.<\/p>\n<p>Endress+Hauser Sensors&amp;Components has been developing customer-specific sensors for over three decades and focus the activities on partnership-based collaboration with customers. An interdisciplinary team from development, product management and sales handle implementing the users\u2019 requirements in the best viable way. All information to the capacitive ceramic pressure portfolio can be found on the corresponding <a href=\"https:\/\/www.sensors-components.endress.com\/en\/industrial-pressure-sensors-endresshauser\/capacitive-ceramic-pressure-sensors\/\">product page.<\/a><\/p>\n<\/div><\/section>\n\n<style type=\"text\/css\" data-created_by=\"avia_inline_auto\" id=\"style-css-av-l81lvsow-333c84c6362932bcda462dbc65e138a3\">\n#top .hr.hr-invisible.av-l81lvsow-333c84c6362932bcda462dbc65e138a3{\nheight:50px;\n}\n<\/style>\n<div  class='hr av-l81lvsow-333c84c6362932bcda462dbc65e138a3 hr-invisible  avia-builder-el-2  el_after_av_textblock  avia-builder-el-last '><span class='hr-inner '><span class=\"hr-inner-style\"><\/span><\/span><\/div>\n","protected":false},"excerpt":{"rendered":"","protected":false},"author":8,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"inline_featured_image":false,"footnotes":""},"categories":[1],"tags":[],"class_list":["post-13427","post","type-post","status-publish","format-standard","hentry","category-uncategorized"],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.0 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>Our Sensors - Your Application: capacative ceramic pressure sensors for vacuum gauge - Customized Pressure Sensors and Components<\/title>\n<meta name=\"description\" content=\"Endress+Hauser Sensors&amp;Components offers sensors for multiples applications. One application example are vacuum measuring devices used in the semiconductor industry, where capacitive ceramic pressure cells are advantageous due to their adaptability, high sensitivity, and long-term stability\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.sensors-components.endress.com\/en\/2025\/06\/17\/our-sensors-your-application-capacative-ceramic-pressure-sensors-for-vacuum-gauge\/\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Our Sensors - Your Application: capacative ceramic pressure sensors for vacuum gauge - Customized Pressure Sensors and Components\" \/>\n<meta property=\"og:description\" content=\"Endress+Hauser Sensors&amp;Components offers sensors for multiples applications. One application example are vacuum measuring devices used in the semiconductor industry, where capacitive ceramic pressure cells are advantageous due to their adaptability, high sensitivity, and long-term stability\" \/>\n<meta property=\"og:url\" content=\"https:\/\/www.sensors-components.endress.com\/en\/2025\/06\/17\/our-sensors-your-application-capacative-ceramic-pressure-sensors-for-vacuum-gauge\/\" \/>\n<meta property=\"og:site_name\" content=\"Customized Pressure Sensors and Components\" \/>\n<meta property=\"article:published_time\" content=\"2025-06-17T05:45:38+00:00\" \/>\n<meta property=\"article:modified_time\" content=\"2025-06-18T06:44:54+00:00\" \/>\n<meta name=\"author\" content=\"Stefanie Renz\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:label1\" content=\"Written by\" \/>\n\t<meta name=\"twitter:data1\" content=\"Stefanie Renz\" \/>\n\t<meta name=\"twitter:label2\" content=\"Est. reading time\" \/>\n\t<meta name=\"twitter:data2\" content=\"3 minutes\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"Article\",\"@id\":\"https:\/\/www.sensors-components.endress.com\/en\/2025\/06\/17\/our-sensors-your-application-capacative-ceramic-pressure-sensors-for-vacuum-gauge\/#article\",\"isPartOf\":{\"@id\":\"https:\/\/www.sensors-components.endress.com\/en\/2025\/06\/17\/our-sensors-your-application-capacative-ceramic-pressure-sensors-for-vacuum-gauge\/\"},\"author\":{\"name\":\"Stefanie Renz\",\"@id\":\"https:\/\/www.sensors-components.endress.com\/en\/#\/schema\/person\/002b3167a8ab35ba68b8b6343bca9c6a\"},\"headline\":\"Our Sensors &#8211; Your Application: capacative ceramic pressure sensors for vacuum gauge\",\"datePublished\":\"2025-06-17T05:45:38+00:00\",\"dateModified\":\"2025-06-18T06:44:54+00:00\",\"mainEntityOfPage\":{\"@id\":\"https:\/\/www.sensors-components.endress.com\/en\/2025\/06\/17\/our-sensors-your-application-capacative-ceramic-pressure-sensors-for-vacuum-gauge\/\"},\"wordCount\":668,\"commentCount\":0,\"inLanguage\":\"en-US\",\"potentialAction\":[{\"@type\":\"CommentAction\",\"name\":\"Comment\",\"target\":[\"https:\/\/www.sensors-components.endress.com\/en\/2025\/06\/17\/our-sensors-your-application-capacative-ceramic-pressure-sensors-for-vacuum-gauge\/#respond\"]}]},{\"@type\":\"WebPage\",\"@id\":\"https:\/\/www.sensors-components.endress.com\/en\/2025\/06\/17\/our-sensors-your-application-capacative-ceramic-pressure-sensors-for-vacuum-gauge\/\",\"url\":\"https:\/\/www.sensors-components.endress.com\/en\/2025\/06\/17\/our-sensors-your-application-capacative-ceramic-pressure-sensors-for-vacuum-gauge\/\",\"name\":\"Our Sensors - Your Application: capacative ceramic pressure sensors for vacuum gauge - Customized Pressure Sensors and Components\",\"isPartOf\":{\"@id\":\"https:\/\/www.sensors-components.endress.com\/en\/#website\"},\"datePublished\":\"2025-06-17T05:45:38+00:00\",\"dateModified\":\"2025-06-18T06:44:54+00:00\",\"author\":{\"@id\":\"https:\/\/www.sensors-components.endress.com\/en\/#\/schema\/person\/002b3167a8ab35ba68b8b6343bca9c6a\"},\"description\":\"Endress+Hauser Sensors&Components offers sensors for multiples applications. One application example are vacuum measuring devices used in the semiconductor industry, where capacitive ceramic pressure cells are advantageous due to their adaptability, high sensitivity, and long-term stability\",\"breadcrumb\":{\"@id\":\"https:\/\/www.sensors-components.endress.com\/en\/2025\/06\/17\/our-sensors-your-application-capacative-ceramic-pressure-sensors-for-vacuum-gauge\/#breadcrumb\"},\"inLanguage\":\"en-US\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"https:\/\/www.sensors-components.endress.com\/en\/2025\/06\/17\/our-sensors-your-application-capacative-ceramic-pressure-sensors-for-vacuum-gauge\/\"]}]},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\/\/www.sensors-components.endress.com\/en\/2025\/06\/17\/our-sensors-your-application-capacative-ceramic-pressure-sensors-for-vacuum-gauge\/#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"Startseite\",\"item\":\"https:\/\/www.sensors-components.endress.com\/en\/home-2\/\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"Our Sensors &#8211; Your Application: capacative ceramic pressure sensors for vacuum gauge\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\/\/www.sensors-components.endress.com\/en\/#website\",\"url\":\"https:\/\/www.sensors-components.endress.com\/en\/\",\"name\":\"Customized Pressure Sensors and Components\",\"description\":\"\",\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\/\/www.sensors-components.endress.com\/en\/?s={search_term_string}\"},\"query-input\":{\"@type\":\"PropertyValueSpecification\",\"valueRequired\":true,\"valueName\":\"search_term_string\"}}],\"inLanguage\":\"en-US\"},{\"@type\":\"Person\",\"@id\":\"https:\/\/www.sensors-components.endress.com\/en\/#\/schema\/person\/002b3167a8ab35ba68b8b6343bca9c6a\",\"name\":\"Stefanie Renz\",\"image\":{\"@type\":\"ImageObject\",\"inLanguage\":\"en-US\",\"@id\":\"https:\/\/www.sensors-components.endress.com\/en\/#\/schema\/person\/image\/\",\"url\":\"https:\/\/secure.gravatar.com\/avatar\/3af7fc5633d1042e5a1ff0d7e5fcad22cbbf1c8aa7c385685776b92e63f5b43a?s=96&d=mm&r=g\",\"contentUrl\":\"https:\/\/secure.gravatar.com\/avatar\/3af7fc5633d1042e5a1ff0d7e5fcad22cbbf1c8aa7c385685776b92e63f5b43a?s=96&d=mm&r=g\",\"caption\":\"Stefanie Renz\"},\"url\":\"https:\/\/www.sensors-components.endress.com\/en\/author\/stefanie\/\"}]}<\/script>\n<!-- \/ Yoast SEO plugin. -->","yoast_head_json":{"title":"Our Sensors - Your Application: capacative ceramic pressure sensors for vacuum gauge - Customized Pressure Sensors and Components","description":"Endress+Hauser Sensors&Components offers sensors for multiples applications. One application example are vacuum measuring devices used in the semiconductor industry, where capacitive ceramic pressure cells are advantageous due to their adaptability, high sensitivity, and long-term stability","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/www.sensors-components.endress.com\/en\/2025\/06\/17\/our-sensors-your-application-capacative-ceramic-pressure-sensors-for-vacuum-gauge\/","og_locale":"en_US","og_type":"article","og_title":"Our Sensors - Your Application: capacative ceramic pressure sensors for vacuum gauge - Customized Pressure Sensors and Components","og_description":"Endress+Hauser Sensors&Components offers sensors for multiples applications. One application example are vacuum measuring devices used in the semiconductor industry, where capacitive ceramic pressure cells are advantageous due to their adaptability, high sensitivity, and long-term stability","og_url":"https:\/\/www.sensors-components.endress.com\/en\/2025\/06\/17\/our-sensors-your-application-capacative-ceramic-pressure-sensors-for-vacuum-gauge\/","og_site_name":"Customized Pressure Sensors and Components","article_published_time":"2025-06-17T05:45:38+00:00","article_modified_time":"2025-06-18T06:44:54+00:00","author":"Stefanie Renz","twitter_card":"summary_large_image","twitter_misc":{"Written by":"Stefanie Renz","Est. reading time":"3 minutes"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"Article","@id":"https:\/\/www.sensors-components.endress.com\/en\/2025\/06\/17\/our-sensors-your-application-capacative-ceramic-pressure-sensors-for-vacuum-gauge\/#article","isPartOf":{"@id":"https:\/\/www.sensors-components.endress.com\/en\/2025\/06\/17\/our-sensors-your-application-capacative-ceramic-pressure-sensors-for-vacuum-gauge\/"},"author":{"name":"Stefanie Renz","@id":"https:\/\/www.sensors-components.endress.com\/en\/#\/schema\/person\/002b3167a8ab35ba68b8b6343bca9c6a"},"headline":"Our Sensors &#8211; Your Application: capacative ceramic pressure sensors for vacuum gauge","datePublished":"2025-06-17T05:45:38+00:00","dateModified":"2025-06-18T06:44:54+00:00","mainEntityOfPage":{"@id":"https:\/\/www.sensors-components.endress.com\/en\/2025\/06\/17\/our-sensors-your-application-capacative-ceramic-pressure-sensors-for-vacuum-gauge\/"},"wordCount":668,"commentCount":0,"inLanguage":"en-US","potentialAction":[{"@type":"CommentAction","name":"Comment","target":["https:\/\/www.sensors-components.endress.com\/en\/2025\/06\/17\/our-sensors-your-application-capacative-ceramic-pressure-sensors-for-vacuum-gauge\/#respond"]}]},{"@type":"WebPage","@id":"https:\/\/www.sensors-components.endress.com\/en\/2025\/06\/17\/our-sensors-your-application-capacative-ceramic-pressure-sensors-for-vacuum-gauge\/","url":"https:\/\/www.sensors-components.endress.com\/en\/2025\/06\/17\/our-sensors-your-application-capacative-ceramic-pressure-sensors-for-vacuum-gauge\/","name":"Our Sensors - Your Application: capacative ceramic pressure sensors for vacuum gauge - Customized Pressure Sensors and Components","isPartOf":{"@id":"https:\/\/www.sensors-components.endress.com\/en\/#website"},"datePublished":"2025-06-17T05:45:38+00:00","dateModified":"2025-06-18T06:44:54+00:00","author":{"@id":"https:\/\/www.sensors-components.endress.com\/en\/#\/schema\/person\/002b3167a8ab35ba68b8b6343bca9c6a"},"description":"Endress+Hauser Sensors&Components offers sensors for multiples applications. One application example are vacuum measuring devices used in the semiconductor industry, where capacitive ceramic pressure cells are advantageous due to their adaptability, high sensitivity, and long-term stability","breadcrumb":{"@id":"https:\/\/www.sensors-components.endress.com\/en\/2025\/06\/17\/our-sensors-your-application-capacative-ceramic-pressure-sensors-for-vacuum-gauge\/#breadcrumb"},"inLanguage":"en-US","potentialAction":[{"@type":"ReadAction","target":["https:\/\/www.sensors-components.endress.com\/en\/2025\/06\/17\/our-sensors-your-application-capacative-ceramic-pressure-sensors-for-vacuum-gauge\/"]}]},{"@type":"BreadcrumbList","@id":"https:\/\/www.sensors-components.endress.com\/en\/2025\/06\/17\/our-sensors-your-application-capacative-ceramic-pressure-sensors-for-vacuum-gauge\/#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"Startseite","item":"https:\/\/www.sensors-components.endress.com\/en\/home-2\/"},{"@type":"ListItem","position":2,"name":"Our Sensors &#8211; Your Application: capacative ceramic pressure sensors for vacuum gauge"}]},{"@type":"WebSite","@id":"https:\/\/www.sensors-components.endress.com\/en\/#website","url":"https:\/\/www.sensors-components.endress.com\/en\/","name":"Customized Pressure Sensors and Components","description":"","potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/www.sensors-components.endress.com\/en\/?s={search_term_string}"},"query-input":{"@type":"PropertyValueSpecification","valueRequired":true,"valueName":"search_term_string"}}],"inLanguage":"en-US"},{"@type":"Person","@id":"https:\/\/www.sensors-components.endress.com\/en\/#\/schema\/person\/002b3167a8ab35ba68b8b6343bca9c6a","name":"Stefanie Renz","image":{"@type":"ImageObject","inLanguage":"en-US","@id":"https:\/\/www.sensors-components.endress.com\/en\/#\/schema\/person\/image\/","url":"https:\/\/secure.gravatar.com\/avatar\/3af7fc5633d1042e5a1ff0d7e5fcad22cbbf1c8aa7c385685776b92e63f5b43a?s=96&d=mm&r=g","contentUrl":"https:\/\/secure.gravatar.com\/avatar\/3af7fc5633d1042e5a1ff0d7e5fcad22cbbf1c8aa7c385685776b92e63f5b43a?s=96&d=mm&r=g","caption":"Stefanie Renz"},"url":"https:\/\/www.sensors-components.endress.com\/en\/author\/stefanie\/"}]}},"_links":{"self":[{"href":"https:\/\/www.sensors-components.endress.com\/en\/wp-json\/wp\/v2\/posts\/13427","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.sensors-components.endress.com\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.sensors-components.endress.com\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.sensors-components.endress.com\/en\/wp-json\/wp\/v2\/users\/8"}],"replies":[{"embeddable":true,"href":"https:\/\/www.sensors-components.endress.com\/en\/wp-json\/wp\/v2\/comments?post=13427"}],"version-history":[{"count":27,"href":"https:\/\/www.sensors-components.endress.com\/en\/wp-json\/wp\/v2\/posts\/13427\/revisions"}],"predecessor-version":[{"id":13483,"href":"https:\/\/www.sensors-components.endress.com\/en\/wp-json\/wp\/v2\/posts\/13427\/revisions\/13483"}],"wp:attachment":[{"href":"https:\/\/www.sensors-components.endress.com\/en\/wp-json\/wp\/v2\/media?parent=13427"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.sensors-components.endress.com\/en\/wp-json\/wp\/v2\/categories?post=13427"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.sensors-components.endress.com\/en\/wp-json\/wp\/v2\/tags?post=13427"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}